Timeline
- Year
- 2017
- Release date
- Unknown
- Type
- process
10 nanometer featuresCobalt interconnectsImproved fin pitchEUV researchQuad patterning
10 nm Process Node
Advanced FinFET process with cobalt interconnects
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
processsemiconductorfabrication10nmfinfet