Timeline
- Year
- 1982
- Release date
- Unknown
- Type
- process
1.5 micron featuresCMOS adoptioni-line lithography (365nm)Improved scalingMulti-level metallization
1.5 μm Process Node
Process technology for 80286 and early 32-bit processors
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
processsemiconductorfabrication1.5um