Timeline
- Year
- 1962
- Release date
- Unknown
- Type
- technique
Small gap spacingFresnel diffractionResolution limitMask damage reductionUV exposure
Proximity Printing Physics
Near-contact lithography with small gap between mask and substrate
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
lithographyproximitycontactoptics