Timeline
- Year
- 1960
- Release date
- Unknown
- Type
- principle
De Broglie wavelengthElectron-matter interactionBackscattering effectsProximity effectSub-10nm resolution
Electron Beam Lithography Physics
Use of focused electron beams for direct-write nanofabrication
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
lithographyelectronsbeamphysics