Timeline
- Year
- 1999
- Release date
- Unknown
- Type
- process
0.18 micron featuresKrF lithography (248nm)Copper damasceneLow-k dielectrics28+ million transistors
180 nm Process Node
Process technology for Pentium III and Athlon processors
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
processsemiconductorfabrication180nm