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Timeline/Category/45 nm Process Node

45 nm Process Node

First process with high-k metal gate transistors

Timeline

Year
2007
Release date
2007-11-12
Type
process
45 nanometer featuresHigh-k metal gateHafnium-based dielectricsArF immersion lithography820+ million transistors

Quality

Confidence
75%
Source authority
primary
Last verified
Unknown
processsemiconductorfabrication45nmhkmg