Timeline
- Year
- 1866
- Release date
- Unknown
- Type
- principle
DOF = k2 × λ / NA²Inverse NA squaredProcess latitudeWafer topography toleranceResolution trade-off
Depth of Focus
Axial range over which acceptable image quality is maintained
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
opticsfocuslithographyimaging