Timeline
- Year
- 1879
- Release date
- Unknown
- Type
- principle
Resolution = k1 × λ / NADefines minimum resolvable featureAngular resolution limitWavelength dependentNumerical aperture relationship
Rayleigh Criterion
Fundamental limit for optical resolution defined by Lord Rayleigh, critical for lithography wavelength selection
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
physicsopticsresolutionrayleigh