Timeline
- Year
- 1860
- Release date
- Unknown
- Type
- principle
Standing wave formationBARC optimizationSwing curve effectsReflectivity controlCD control
Thin Film Interference in Lithography
Interference effects in resist and anti-reflective coatings
Quality
- Confidence
- 75%
- Source authority
- primary
- Last verified
- Unknown
opticsinterferencethin-filmscoatings